Try Nitric acid (HNO3) 30% etching time 3-4 minutes for ceramic, 5-7 min for single crystal On Wed, 12 Dec 2001 KunLungYen@itri.org.tw wrote: > hi, > > does anyone know the etchant for PZT? > thanks in advance. > > Kun-lung Yen > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/