Hi Lior,
you can deposit Parylene on your Si wafer and then do Excimer laser ablation
to create pattern in parylene. Then you can deposit your metal. Our company
Laser Light Technologies is a  job- shop in laser micromachining and we have
intensive experience in this area.
Regards,
Alex Pozdin,
Director of Engineering
5 Danuser Dr.
Hermann, MO 65041 USA
ph. 573-486-5500
fax 573-486-5540
e-mail: apozdin@laserusa.com