There are some mistakes at the text version of this message: Temperature up to 120 deg. Celsius Holes diameter: 300 micrometer and tolerance 50 micrometer. Heike Bartsch de Torres Heike Bartsch de Torres schrieb: > Helo Roger, > if your structure withstand temperatures up to 1200C you can structure it by > sandblasting. 3005m-holes can be done with a tolerance of about 505m. > Another possibility is to use an deep ICP-Process (Bosch). > Greetings Heike > > Heike Bartsch de Torres > Dev. Eng. > Little Things Factory GmbH > Ehrenbergstr. 11 > 98693 Ilmenau > Germany > hb@ltf-gmbh.de > > Roger Brennan schrieb: > > > Greetings: > > Is the following feasible? > > 1) Mask <100> silicon wafers having aluminum and titanium structures. > > 2) Etch holes all the way through (300 microns) etching from both sides > > using EDP or KOH. > > 3) Remove the photoresist without disturbing the Ti or Al. (I worry about > > galvanic effects during the stripping due to the presence of Si, Ti, and > > Al.) > > It is my understanding that well cured SU8 might work as the resist and > > SMST-M might work as the stripper. The following is all I know about the > > stripper: > > "SMST-M This formulation is the standard formulation. It doesn't attact > > metals such as aluminium, gold, titanium, chromium, but a slight attact of > > copper and nickel can be observed." > > > > I have contacted the vendor of the stripper, SOTEC MICROSYSTEMS SA, but > > often users know more than the vendor. > > > > Roger Brennan > > Home: > > 1403 Forrestal Avenue > > San Jose, CA 95110 > > (408)453-0711 (telephone) > > (408)573-9407 (fax) > > rogerbr@earthlink.net > > > > Work: > > Endevco > > 355 N. Pastoria Ave. > > Sunnyvale, CA 94085 > > 408-739-3533 ext 204 > > roger.brennan@endevco.com > > _______________________________________________ > > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > Hosted by the MEMS Exchange, providers of MEMS processing services. > > Visit us at http://www.mems-exchange.org/ > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/