Hi Thomas,

I used STR 1045 from Shipley that stood up to some DRIE Silicon etch. I
suspect that you should be able to do the same. It is about 5um thick. STR
1075 is about 7um. If you can do a long softbake/hardbake you should be
able to get the resist to stand up for that long. I don't have any
experience with Oxide DRIE so I don't know if the difference in adhesion is
going to cause problem.

Good luck and happy holiday season!

Henry Yang

Jon Doe @memsnet.org on 12/21/2001 04:14:07 PM

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Subject:  [mems-talk] Thick positiv resist



 Hi all:
Does anybody out there have experience with a thick
positive resist, which holds up to 20 um deep RIE
oxide etches?
Thanks for sharing your experience with us.
Happy Holidays.
Thomas

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