durusmail: mems-talk: etch psg oxide with Al
etch psg oxide with Al
etch psg oxide with Al
Ravi Shankar
2001-12-25
Hi
i want to etch psg oxide without affecting aluminium, could anybody give
me some reference regarding it. in fact i found out from somewhere that
ammonium fluride and acitic acid is good, but could not get any further
info on its concentration, temperature and working mechanism.
regds
ravi shankar

reply