durusmail: mems-talk: thin film thermocouples on Si-wafer
thin film thermocouples on Si-wafer
2002-01-07
2002-01-07
thin film thermocouples on Si-wafer
Bernard Revaz
2002-01-07
Hi,
I'm interested in measuring the local temperature (in the plane) of the
back side of a metal piece during electroerosion. The temperature is not
expected to rise much above 100 C.
Is someone aware of a company that produces Si-wafers with integrated
arrays of thin film thermocouples ? (something like 10 thermocouples per
cm^2)
Thanks in advance
Bernard Revaz

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