durusmail: mems-talk: Q: Tools, Simulator FAQ
Q: Tools, Simulator FAQ
Q: Tools, Simulator FAQ
Burkhard Volland
2002-01-07
Hi everybody.

Is there a FAQ available for the various tools and simulation packages, like
mask layout editors, simulators for wafer oxidation, deposition, reactive
ion etching, and so on?

If it's not yet available, would you mind posting (whatever you know about
the relevant software)

a) names of  programs/packages
b) purpose (eg. mask editor, process simulator, ..)
c) the URL/homepage adress(es)
d) comments (e.g. freeware, user friendly, accurate, ...)
e) operating systems

to me (my personal adress, not the list)?

I would like to compile all of your input (and what I know) into a
simulation and tools FAQ that could be posted to the list and/or presented
at the Memsnet.org homepage, if they let me.

Regards

Burkhard Volland
bvolland@hrz.uni-kassel.de

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