durusmail: mems-talk: liftoff advice
liftoff advice
1996-06-28
liftoff advice
Kevin M. Walsh
1996-06-28
I have a grad student doing some metal liftoff using Shipley 1800-27 positive
resist and chlorobenzene. He is encountering some problems with his processing.
Would anyone be able to give him advice? His name is Rizwan Aziz and can be
contacted at r0aziz01@starbase.spd.louisville.edu Thanks, Kevin Walsh -- Dr.
Kevin M. Walsh Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292 (502) 852-0826 Internet address:
kmwals01@starbase.spd.louisville.edu


reply