durusmail: mems-talk: Sio2 Deposition
Sio2 Deposition
Sio2 Deposition
Kishore Sundara Rajan
2002-01-10
Hi,

I am trying to deposit about 50 Microns of Sio2 on Si and want a very
flat surface profile. Can some one suggest an appropriate method for it?
Thanking You in advance,

Kishore Sundara Rajan
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Kishore Sundara Rajan
Graduate Research Assistant
Institute For
Micromanufacturing
Louisiana Tech University

Ph  # (318) 251 - 1786
Fax #
(773) 243 - 7948
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