Baecklund and Rosengren published papers (J.Mems, 1992 and 1995) which describe the fabrication of V-grooves and free-standing studs with 45 degree angles to the Si surface ((100) wafer) using KOH and EDP. -Nihat -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of David Nemeth Sent: Monday, January 14, 2002 8:24 AM To: mems-talk@memsnet.org Subject: RE: [mems-talk] a 45-degree inclined surface One trick I saw in the literature was to add a surfactant to the TMAH etch(the paper mentioned using something called NCW-601A nonionic surfactant from the Wake Pure chemical company. They used 22% TMAH solution with 1% weight surfactant.) This has the effect of greatly reducing the etch rate of the <110> plane in silicon, so a pattern with straight edges patterned parrallel to the <010> plane (45 degrees off of the normal wafer flat) would reveal the <110> plane, which is at 45 degrees. I don't remember the name of the journal, but the authorwas Masayuki Sekimura at Toshiba Corp (email masayuki.sekimura@toshiba.co.jp). The paper identification on the bottom is 0-7803-5194-0/99 page 650. Hope this helps. I would imagine other surfactants would have a similar effect. David Nemeth Senior Process Engineer Sophia Wireless, Inc. 14225-C Sullyfield Circle Chantilly, VA Ph: (703) 961-9573 x206 Fax:(703) 961-9576 -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of ahmed osman Sent: Monday, January 14, 2002 6:57 AM To: mems-talk@memsnet.org Subject: [mems-talk] a 45-degree inclined surface Hi all, Is there a micromachining technique that can achieve a surface 45 degree-inclined with respect to the wafer surface? I'm not restricted to a specific material nor to a specific technology,but the 45-degrees should be achieved with high accuracy and thus i first considered wet etching in silicon but i failed to get the required angle by any of the known tricks. _________________________________________________________________ Get your FREE download of MSN Explorer at http://explorer.msn.com/intl.asp. _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/ _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/