> Could anyone tell me how to wet-etch Cr/Au films? Which
> etchant should I use? Thanks.


For Cr, use CR-7 (perchloric acid-based) or CR-14 (acetic acid-based),
with etch rates of about 140 and 110 nm/min, respectively.
CR-14 has less undercut of photoresist, but a shorter shelf life.

For Au, use AU-5 (KI + I2), with an etch rate of about 81 nm/min.

Both are available from Cyantek in Fremont, California.
Transene, in Danvers, Mass., has similar etchants.

        --Kirt Williams Agilent Technologies