Hi Mike,

Certain PECVD systems require a burn box and others require a scrubber and
burn box. This is very dependant on the gases you are trying to flow and the
local fire departments requirements as well as local air quality restrictions.
The type of gases and number of chambers you want to run to the same unit
dictate the type of unit.

Sincerely,
Walter Stonas

-----Original Message-----
From: Michael Martin [mailto:michael.martin@louisville.edu]
Sent: Wednesday, January 30, 2002 4:20 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Burn boxes


Can anyone recomend a good vendor for a Burn Box to be used on a PECVD
system? Have one to sell?

Thanks,
     Mike
     U of Louisville
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