Have a look at
Artur Degen, "Investigation of Stress in Silicon Membranes", Dissertation,
Univ. of Kassel, 2001. The stress was calculated from membrane defelctions.
Or, search for "Degen" as author in SPIN Web.

Regards,
Burkhard
-----Urspr|ngliche Nachricht-----
Von: Mandar Deshpande 
An: mems-talk@memsnet.org 
Datum: Montag, 4. Februar 2002 18:28
Betreff: [mems-talk] Contact less displacement sensor


>Hi,
>I am looking for  a supplier who can provide a contact less micro
>displacement sensor for measuring membrane deflection.
>I would appreciate if anyone can give me a contact or suggest any other way
>to do the measurement.
>
>Thanks
>
>-Mandar Deshpande
>Graduate Student
>Mechanical Engineering
>UIC- Chicago
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