durusmail: mems-talk: Metal thinfilm conduction
Metal thinfilm conduction
2002-02-04
2002-02-08
Metal thinfilm conduction
Michael D Martin
2002-02-06
We are doing some work on microhotplates and have been running a
simulation in MEM CAD. I have noticed a degree of variation in the
charge density near corners in the hot plate.

-Mike

>>> joycewon@spock.usc.edu 02/04/02 10:44AM >>>
Hi all,

I'm doing some heat transfer numerical simulation of a thinfilm heater
that
has a lot of 90-deg turns. The heater is made of evaporated gold on a
single crystal LSN substrate. The dimension is 400um wide and about 1um

thick, and I'm applying a 5-15VDC current-unlimited power to the
heater. I
understand that the method of fabrication might have introduced some
thickness non-uniformity at the corners. But if I assume the thickness
is
uniform, is electrical conduction at corners differ noticeably than for
a
straight path (like in fluid flow)? Or does the electron spatial and
temporal scale of travel make the existent of the corner irrelevant?

Any suggestions and/or references would be greatly appreciated.
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