Dear Russel,
Wer'e exposing SU8 on a braod band tool. However, I belive it also has
quite a lot of energy in I-line. Any tools that does not specially cut the
400 and below will have it since the I-line of the Mercury arc lamp is very
energetic.

Shay Kaplan

RCox@clare.com wrote:

> Is anyone using SU-8 with broadband exposure tools (g and h line)?  I
> understand that the resist is insensitive above 400nm.
>
> Russell Cox
> Process Engineer-Clare, Inc.
> 978-524-6846 Work Phone
> 978-479-2767 Cell Phone
> _______________________________________________
> mems-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/