I would like to know if anyone has done or know of some results of the etch rate of 111 planes in silicon, in KOH. The values I've found in the litterature seems to low. Med venlig hilsen/Kind regards Brian S. Semak, M.Sc. (Phys.) R&D Hermetic Packaging Hymite Aps DTU, Bygn. 325, 1st floor 2800 Lyngby Telephone(Direct): + 45 4525 9147 Fax: + 45 4525 9156 E-mail: BSE@hymite.com www.hymite.com