durusmail: mems-talk: Si (111) etch rates
Si (111) etch rates
Si (111) etch rates
Brian Semak
2002-02-08
I would like to know if anyone has done or know of some results of the etch
rate of 111 planes in silicon, in KOH. The values I've found in the
litterature seems to low.

Med venlig hilsen/Kind regards

Brian S. Semak, M.Sc. (Phys.)
R&D Hermetic Packaging

Hymite Aps
DTU, Bygn. 325, 1st floor
2800 Lyngby

Telephone(Direct): + 45 4525 9147
Fax:                     + 45 4525 9156
E-mail: BSE@hymite.com
www.hymite.com

reply