Hi,
I'm trying to have Si_3 N_4 using a PECVD sistem.
I have at my disposal SiH_4 (Silane) (2% of SiH_4 in N_2) and N_2 and
i'm looking for a recipe to get Si_3 N_4.
Can someone give me some suggestion about the power, the temperature and
the ratios of Silane and Nitrogen?
Thanks a lot,
Zeila

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