durusmail: mems-talk: Metal thinfilm conduction
Metal thinfilm conduction
2002-02-04
2002-02-08
Metal thinfilm conduction
Jon Doe
2002-02-08
Of course current densitiy is different in the
corners. There is a a lot of literature on this
subject where you go into contact holes for example on
IC chips. The phenomena is called current crowding.

Good luck.

Thomas

--- Michael D Martin 
schrieb: > We are doing some work on microhotplates
and have
> been running a
> simulation in MEM CAD. I have noticed a degree of
> variation in the
> charge density near corners in the hot plate.
>
> -Mike
>
> >>> joycewon@spock.usc.edu 02/04/02 10:44AM >>>
> Hi all,
>
> I'm doing some heat transfer numerical simulation of
> a thinfilm heater
> that
> has a lot of 90-deg turns. The heater is made of
> evaporated gold on a
> single crystal LSN substrate. The dimension is 400um
> wide and about 1um
>
> thick, and I'm applying a 5-15VDC current-unlimited
> power to the
> heater. I
> understand that the method of fabrication might have
> introduced some
> thickness non-uniformity at the corners. But if I
> assume the thickness
> is
> uniform, is electrical conduction at corners differ
> noticeably than for
> a
> straight path (like in fluid flow)? Or does the
> electron spatial and
> temporal scale of travel make the existent of the
> corner irrelevant?
>
> Any suggestions and/or references would be greatly
> appreciated.
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