Shay,

SU-8 is optimised for I-line exposure. The sensitivity drops off sharply
above I-line and is grows rapidly as the wavelength is dropped below 350nm.

Microchem provide a graph of the sensitivity as the wavelength varies in
their SU-8 datasheet on their website. It is available for download as a PDF
document.

Hope this helps,

Kevin Banks

>From: Brubaker Chad 
>Reply-To: mems-talk@memsnet.org
>To: mems-talk@memsnet.org
>Subject: Re: [mems-talk] SU-8 Resist Sensitivity
>Date: Fri, 8 Feb 2002 08:51:55 -0700
>
>Dear All,
>
>Su-8 is only sensitive to radiation below 400nm.  However, as Shay
>mentioned, oftentimes broadband equipment will actually be capable of all
>three (g-, h-, and i-line) bands.  SU-8 responds best to radiation between
>350nm and 400nm, and is particularly sensitive to i-line.  Care must be
>taken not to expose the SU-8 to any radiation below 350 nm, however, as the
>material is also highly sensitive in this range, and will provide a
>distorted profile.
>
>A good site for information on SU-8 can be found at:
>
>http://aveclafaux.freeservers.com/SU-8.html
>
>
>Best Regards,
>
>Chad Brubaker
>
>
>
>EV Group-Technology, Tel: (602) 437 9492 x 119, Fax: (602) 437 9435
>E-mail: C.Brubaker@evgroup.com  ,  Web:
>www.EVGroup.com  , 02/08/02
>
>-----Original Message-----
>From: shay kaplan [mailto:shay@mizur.com]
>Sent: Thursday, February 07, 2002 7:58 AM
>To: mems-talk@memsnet.org
>Subject: Re: [mems-talk] SU-8 Resist Sensitivity
>
>
>Dear Russel,
>Wer'e exposing SU8 on a braod band tool. However, I belive it also has
>quite a lot of energy in I-line. Any tools that does not specially cut the
>400 and below will have it since the I-line of the Mercury arc lamp is very
>energetic.
>
>Shay Kaplan
>
>RCox@clare.com wrote:
>
> > Is anyone using SU-8 with broadband exposure tools (g and h line)?  I
> > understand that the resist is insensitive above 400nm.
> >
> > Russell Cox
> > Process Engineer-Clare, Inc.
> > 978-524-6846 Work Phone
> > 978-479-2767 Cell Phone
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