You can find the specs at:

http://www.fda.gov/ora/inspect_ref/itg/itg20.html

I think the "zero error" of the helium leak detector would
be comparableto the leaks from volumes of the order of 1 mm3? Is that
right?

Abhinav


On Fri, 8 Feb 2002, Oberhammer Joachim wrote:

> Common test specifications (leak and gross test) for hermetic
> packages are given in MIL-STD-883E, Method 1014.9 (SEAL). You can
> download the whole test specifications from the net (I don't remember
> the link). I doubt the suitability of at least the He-test for
> volumes much smaller than 1 mm^3. Check out
>
> Rao R. Tummala: "microelectronics Packaging Handbook: Semiconductor
> packaging (Part II)", Kluwer, 1997, 2nd ed, pp. II-887.
>
> Jourdain et al, "investigation of the hermeticity of BCB-sealed
> cavities for housing (RF-)MEMS devices", Proc. MEMS2002, pp. 677-680.
>
> >
> >Date: Thu, 07 Feb 2002 01:34:47 +0800
> >Subject: [mems-talk] Leak test for vacuum package.
> >Could you please give me some advice or information about
> >leak test for vacuum package? As far as I know, there are
> >some standard for leak test including fine and gross test.
> >However, it is reported that the method is not very appropriate
> >for small cavity.
> >
> >Li Gang
> --
> Joachim Oberhammer, Dipl.-Ing.