durusmail: mems-talk: Control the pore size and layer thickness of porous silicon
Control the pore size and layer thickness of porous silicon
2002-02-14
Control the pore size and layer thickness of porous silicon
Control the pore size and layer thickness of porous silicon
2002-02-16
Control the pore size and layer thickness of porous silicon
Control the pore size and layer thickness of porous silicon
Giuseppe Barillaro
2002-02-18
Hi Frank,
i'm sorry :-), now i'll give you the right reference ofd the review of Smith
and Collins.
"Porous silicon formation mechanisms", R L Smith, S D Collins, J. Appl.
Phys. 71, R1 (1992).
That's the review. Sorry again for the mystake, for any question contact me.
Giuseppe



> Hi Giuseppe:
>
> It seems that the review article has no relationship
> with porous silicon. Is there any other reference that
> you may recommend to me?
>
> Frank
> Feb.16,2002
> --- Giuseppe Barillaro 
> wrote:
> > Hi Frank,
> > pore size depends on the doping and type of the used
> > silicon substrate (for
> > instance, p substrate give nanopore, while n
> > substrate give macropore); the
> > thickness of grown layer depends on the anodization
> > time and the etching
> > density current,  with a rate, however, of few
> > microns/min for higher
> > current.
> > You can find some good information and reference in
> > the review of Smith and
> > Collins, Phys. Rev. A, 39, 5409 (1989).
> > Good luck,
> > Giuseppe
> >
> >
> > > Control the PORE SIZE & LAYER THICKNESS of Porous
> > > Silicon:
> > >
> > > Are there any books or papers talking about how to
> > > control the pore size and layer thickness of
> > forming
> > > porous silicon?
> > >
> > > Best Regards!
> > >
> > > Frank
> > > Feburary 14th,2002
> > > Send FREE Valentine eCards with Yahoo! Greetings!
> > > http://greetings.yahoo.com
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