Have you had problems with SU-8 on your drie? What type of problem? We
haven't seen any problems to date even when we switch back and forth from
positive resist to SU-8. Do you have the capability of coating 10 wafers with
the Shipley resist using a MEMS type mask with 2-50 micron trenches on 4"
wafers? Gladly pay for such samples. Bob Henderson 480-558-1156