You can do this with front to back through wafer alignment.  Karl Suss and
Quintel have front to back options for most of their aligners.

Eric G. Johnson, PhD
Assistant Professor of Optics
School of Optics/CREOL
University of Central Florida
P.O. Box 162700
4000 Central Florida Blvd
Orlando, FL 32816-2700
(407)823-6803
Fax 823-6880

>>> patton@er.com 2/19/2002 9:32:36 AM >>>
Dear Mems group,

I have a single side mask aligner.  Is there a method by which this aligner
can be used to align features on both sides of the wafer?

Thanks for your assistance.

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Incorporated
6410 Eastland Road
Cleveland, Ohio 44142
www.er.com
(440) 816-9850
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