Try drilling holes through the wafer the you will have the same alignment
points on both sides

-----Original Message-----
From: Martin O. Patton [mailto:patton@er.com]
Sent: Tuesday, February 19, 2002 7:33 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Is there a way to align two sides of wafer


Dear Mems group,

I have a single side mask aligner.  Is there a method by which this aligner
can be used to align features on both sides of the wafer?

Thanks for your assistance.

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Incorporated
6410 Eastland Road
Cleveland, Ohio 44142
www.er.com
(440) 816-9850
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