One way to do this is to send your samples to a laser job shop. You can
use 193 nm excimers to machine glass nicely. One company is JPSA Laser
in New Hapshire, 603-595-7048

-Mike

>>> dleeli@hotmail.com 02/19/02 09:26AM >>>
I need to drill diameter 100um in thick glass wafer(thickness is from
1mm to
3mm). would you like to help me to figure out some way or which company
can
do that?

thanks for your any information

Dlee
Research Asistant
Mechanical Engineering Department
University of Texas At Austin, TX

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