Ultratech now also offers a dual side stepper (with projection
optics, so it works even on substrates that are not transparent
to IR), which is very suitable for mass production. The system
was developed in collaboration with us and we have the first
one here in our facility.

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore


-----Original Message-----
From: Kirsch Dave [mailto:D.Kirsch@RI.EVGroup.com]
Sent: 19 February 2002 23:57
To: mems-talk@memsnet.org
Subject: RE: [mems-talk] Is there a way to align two sides of wafer


Please gentlemen, with due respect to the names listed below.  There is
another very prominent game in town.  EV Group, Inc.  With Aligners for MEMS
and other equally exotic applications.

Thank you for your attention.

Regards,

Dave Kirsch

 EV Group US Inc., Cranston, RI, USA / Tel:   (401)784-0008, Cell:
(401)743-1505, Fax (401)784-9933
e-mail: D.Kirsch@EVGroup.com, Web Site: www.EVGroup.com


 -----Original Message-----
From:   Eric Johnson [mailto:eric@creol.ucf.edu]
Sent:   Tuesday, February 19, 2002 10:45 AM
To:     mems-talk@memsnet.org
Subject:        Re: [mems-talk] Is there a way to align two sides of wafer

You can do this with front to back through wafer alignment.  Karl Suss and
Quintel have front to back options for most of their aligners.

Eric G. Johnson, PhD
Assistant Professor of Optics
School of Optics/CREOL
University of Central Florida
P.O. Box 162700
4000 Central Florida Blvd
Orlando, FL 32816-2700
(407)823-6803
Fax 823-6880

>>> patton@er.com 2/19/2002 9:32:36 AM >>>
Dear Mems group,

I have a single side mask aligner.  Is there a method by which this aligner
can be used to align features on both sides of the wafer?

Thanks for your assistance.

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Incorporated
6410 Eastland Road
Cleveland, Ohio 44142
www.er.com
(440) 816-9850
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