durusmail: mems-talk: Drill diameter 100um in thick glass wafer
Drill diameter 100um in thick glass wafer
2002-02-19
Dlee Li
2002-02-20
Vic Kley
2002-02-19
Michael D Martin
2002-02-19
Kenneth Smith
2002-02-21
Vic Kley
2002-02-21
Martin, Dick
2002-02-21
Vic Kley
Slow wet etch of GaAs?
2002-02-22
Xinbing Liu
2002-02-25
Nigel Sharma
Drill diameter 100um in thick glass wafer
Vic Kley
2002-02-21
Putting a three inch recess in a six inch wafer is a relatively
straightforward machining operation. Depending on finish and depth accuracy
there are three common ways. Lapped or diamond cut, milled, immersion EDM.
see your local machine shop listings.

Vic

----- Original Message -----
From: Kenneth Smith 
To: 
Sent: Wednesday, February 20, 2002 2:13 AM
Subject: Re: [mems-talk] Drill diameter 100um in thick glass wafer


> In a similar yet different vain- anyone have a idea or source that can
> 'gouge' a 77mm hole 600um  deep into a 1000um 150mm Silicon Wafer. I
> know that I can fabricate SOI style bonded wafers with one wafer with a
> tru-cut, but this is expensive.
> Any contacts or ideas let me know.
>
> Regards,
> Ken Smith
>
> Kmbh Associates
> 4968 Charter Road
> Rocklin, CA  95765  U  S  A
> 510-714-5055 Efax- 510 217 4421 or 561 658 6136
>
> High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
> Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
> applications. Service in SOI, Polishing SSP and DSP.
> Quartz, Glass, Pyrex and Borofloat Wafer Supply. Anodic Bonding. SOG, SOS.
>
> Michael D Martin wrote:
>
> > One way to do this is to send your samples to a laser job shop. You can
> > use 193 nm excimers to machine glass nicely. One company is JPSA Laser
> > in New Hapshire, 603-595-7048
> >
> > -Mike
> >
> >
> >>>>dleeli@hotmail.com 02/19/02 09:26AM >>>
> >>>>
> > I need to drill diameter 100um in thick glass wafer(thickness is from
> > 1mm to
> > 3mm). would you like to help me to figure out some way or which company
> > can
> > do that?
> >
> > thanks for your any information
> >
> > Dlee
> > Research Asistant
> > Mechanical Engineering Department
> > University of Texas At Austin, TX
> >
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>
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