durusmail: mems-talk: references on reactive ion etching of siloxane based SOG
microphone testing
2002-02-27
Kyu Tae Yoo
2002-03-11
Wieslaw Bicz
2002-02-27
Michael Pedersen
references on reactive ion etching of siloxane based SOG
2002-02-27
W. Wang
2002-02-27
Babu(Panduga)
references on reactive ion etching of siloxane based SOG
W. Wang
2002-02-27
hi, does anybody have any information on etching of siloxane based SOG
in parallel plate type reactor using CHF3 gas?


-weichih
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