temperature will be one for sure. Other parameters
will depend upon the mems product and the electronics
that you are integrating it with. what kind of
electronics is it, cmos, ?

Equipment needs should be thought out carefully, based
upon 'your' requirements. sometimes an in-house
equipment provides a faster/cost-effective solution.
Again, it all depends upon the application.

hope that helps,

Abhinav

--- Manoj Wadhwa  wrote:
> Hello!
>
> Our company semiconductor complex ltd, India is
> diversifying into
> manufacturing of MEMS devices. We are in the process
> of finalising the
> equipment required.
>
> Can anyone suggest what are issues related to
> integartion of MEMS with
> electronics? Will we require some specific equipment
> to resolve these issues?
>
> Thanks,
>
> Manoj Wadhwa
> Manager - VLSI
> SCL - INDIA
> WEB : www.sclindia.com/fab.html
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