You might also check out www.diamonex.com for diamond stuff... David Nemeth Senior Process Engineer Sophia Wireless, Inc. 14225-C Sullyfield Circle Chantilly, VA Ph: (703) 961-9573 x206 Fax:(703) 961-9576 -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of Ertl, Stephan Sent: Friday, March 08, 2002 10:57 AM To: mems-talk@memsnet.org Cc: hogedoorn@pml.tno.nl; Rick Williston Subject: AW: [mems-talk] High temperature - Solution with Diamond MEMS ? Hi ! Hot Stuff ! I really would like to know what you are working on. Your Web-Site does not tell too much ... Rick's idea of the diamond heat sink is nice. Diamond works pretty well up to 6000C in oxygen containing atmosphere, up to 12000C in vacuum or when passivated (for higher temperatures it starts graphitizing). If you go to higher temperatures it will work with some tricks, but soon reach its limits. We developed a technology basis for Diamond MEMS (deposition of highly oriented diamond on 2" Si wafers, surface and bulk micromachining, plasma etching and so on) and already realized several prototypes, including diamond temperature sensors. They can be realized in a wide range of sensitivities. If you think that diamond microstructures could be a solution to your problem please contact us. Hope this helps Stephan Ertl Director R+D GFD Gesellschaft f|r Diamantprodukte mbH 89081 Ulm Germany _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/