durusmail: mems-talk: Wafer Drying
Wafer Drying
2002-03-11
2002-03-11
2002-03-11
Wafer Drying
Bill Moffat
2002-03-11
Roger,
      I saw a copy of that IsoDryer at a trade show about 5 years ago.  It was
being displayed by Dale Ann Springer who worked for A.I.O. at the time.  I
have a buddy who works for A.I.O. at this time, Suzanne Scullen.  I will try
to reach Suzanne to see what she knows about this type of dryer and try to
find Dale Ann to see what she knows.  When I have collected data I will be
back at you.  I may have to call you to relay all of the details.  Bill
Moffat.

-----Original Message-----
From: Roger Brennan [mailto:rogerbr@earthlink.net]
Sent: Monday, March 11, 2002 6:21 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Wafer Drying


Hi Everybody:

I have an "Iso-dryer"  (a vapor "de-greaser" using isopropyl alcohol) ready
to be replaced.  It has been suggested that I replace it with a Marangoni
drier.  As I understand this system, a layer "atomized" mist of very small
liquid droplets of isopropyl hovers over the top of DI wafer.  As the
wafers move from the DI water to the iso, the wafers are supposed to be
dried.  So far, I have talked to the vendor, Avid Technology, Mountain
View, CA,  www.Itechcorp.com

Sounds like magic!  Is anyone out there using such a system and are you
happy with it?

Thanks,


Roger Brennan
Home:
1403 Forrestal Avenue
San Jose, CA 95110
(408)453-0711 (telephone)
(408)573-9407 (fax)
rogerbr@earthlink.net

Work:
Endevco
355 N. Pastoria Ave.
Sunnyvale, CA 94085
408-739-3533 ext 204
roger.brennan@endevco.com
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