durusmail: mems-talk: Wafer Drying
Wafer Drying
2002-03-11
2002-03-11
2002-03-11
Wafer Drying
BobHendu@aol.com
2002-03-11
White magic I would think. There are a couple of companies that offer similar
systems. I thought Mattson offered both Marigoni and CFM vapor dry which are
similar. Cost might be an issue with these systems and an old iso dryer with
coils seems to work just fine last time I checked. Bob Henderson

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