Intellisuite and CoventorWare (aka MEMCAD) will do the trick... but they
are not exactly what can be called freeware (especially the second one -
although they both have 'academic' prices)!

They work both very similarly (same father apparently, but I don't know
the mother :-): it is 'just' a layout importer (the masks in GDSII) that
gives the plane pattern, with a process description that gives the
thickness of the layers. They still need a proper manual editing, at
least to check that everything went well (node connection,
inside-outside...).
Of course it works for 2.5D only (not real 3D, only extruded 2D), but I
believe it is what you're talking about (actually, Coventor has limited
'sloped' etch simulation possibilities, allowing to have sidewall with a
fixed angle - more or less 2.6D :-).
Franck

"-----Original Message-----
"From: Ed Buturla [mailto:ebuturla@us.ibm.com]
"Sent: Sunday, 10 March, 2002 20:39
"To: mems-talk@memsnet.org
"Subject: [mems-talk] meshing from GDS II
"
"
"I am looking for mesh generation capability to go from layout
"data(in the
"form of GDS II data) to a 3D mesh. I am aware of a capability from CFD
"called CFD-Micromesh. Are their other capabilities? Any public domain
"codes?
"Thanks,
"Ed
"
"Ed Buturla
"EDA Project Manager
"
"802-769-1171, 8-446-1171
"ebuturla@us.ibm.com
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