durusmail: mems-talk: Anodic Bonding of Si to Pyrex
Anodic Bonding of Si to Pyrex
Anodic Bonding of Si to Pyrex
Connie Kathleen Smith
2002-03-14
I need to bond Pyrex to both sides of a silicon wafer.  One of the pieces
of Pyrex is a full 4 inch diameter wafer (same as Si wafer)  with a
thickness of 0.5 inches.  This is used as the base for a flow cell etched
into the wafer.  The other piece of Pyrex is a cover slip for microscopy
work so it is only 0.13 mm in thickness and a 50mm square.

Has anyone ever anodically bonded pyrex to both sides?  All the literature
I read only describes the process for one side.

Thank you,
Connie Smith
Department of Chemical Engineering
Rice University
6100 Main MS 362
Houston, TX 77005
Phone 713-348-3507
Fax 713-348-5478

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