durusmail: mems-talk: Thick Photoresist Materials/Applications
Thick Photoresist Materials/Applications
Thick Photoresist Materials/Applications
JAMES.R.THORPE
2002-03-15
Frank

I use Shipley SJR5740 as a positive alternative to SU-8 for films up
to 80um thick and sometimes thicker :-). I've done some
characterisation of the processing - contact me directly if you want
more info.

Rgds

Jim.

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Dr Jim Thorpe
Research Fellow

Institute of Microwaves and Photonics
School of Electronic and Electrical Engineering
The University of Leeds
Leeds
LS2 9JT

United Kingdom

Tel: +44 (0)113 233 2049 (Office)
Tel: +44 (0)113 233 2084 (Lab)
Fax: +44 (0)113 244 9451
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