Frank I use Shipley SJR5740 as a positive alternative to SU-8 for films up to 80um thick and sometimes thicker :-). I've done some characterisation of the processing - contact me directly if you want more info. Rgds Jim. *********************************************** Dr Jim Thorpe Research Fellow Institute of Microwaves and Photonics School of Electronic and Electrical Engineering The University of Leeds Leeds LS2 9JT United Kingdom Tel: +44 (0)113 233 2049 (Office) Tel: +44 (0)113 233 2084 (Lab) Fax: +44 (0)113 244 9451 ***********************************************