durusmail: mems-talk: SU-8 spinning problems
SU-8 spinning problems
2002-03-15
2002-03-15
2002-03-15
2002-03-15
wafer level vacuum packaging
2002-03-15
2002-03-15
SU-8 spinning problems
BobHendu@aol.com
2002-03-15
Try placing a lid on after dispense before spinning and shut off your exhaust
at the same time. There are various valves like one from a company called
Progressive Technologies. This will allow the thick resist to spread without
loosing too much of its solvent . Use a 400 rpm spread speed and then ramp to
the final spin speed for whatever thickness you desire. Bob Henderson

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