Resist spreading -

A technique used to minimize the quantity of resist dispensed on a wafer
is to pre-wet the wafer with the solvent - not dry completely then dispense
and spin. One of the resist companies did some work on it if I recall
correctly.
You can understand why they would not publicize it much. I don't know how
it would work if you have very large topography but it may be worth a try.

Avi Laker
Teccor Electronics