durusmail: mems-talk: How to get 2" Si wafer and etch 45 degree V-groove?
How to get 2" Si wafer and etch 45 degree V-groove?
2002-03-18
How to get 2" Si wafer and etch 45 degree V-groove?
2002-03-19
How to get 2" Si wafer and etch 45 degree V-groove?
Kenneth Smith
2002-03-19
Lib,

Contact me on the 2" .
On the the material that you are using that you had expected the 45
degree and obtained the 54.7 degree was clearly not Off cut at 9.7
degree as this Off cut WILL obtain the 45 degree V-groove. We have
supplied this material to other users and have not had incident of poor
yields and obtained the 45 degree V groove. It appears that your
material is cut ON orientation.

Regards,
Ken Smith


lib zhou wrote:

> Hi,Dear All:
>
> I am interested to know if anyone can send me some information which company
> can still sell high quality 2" single-crystal silicon wafer. by the way, I
have an another
> question related to (100) Si anisotropic etch by KOH, how can get a 45 (or
135)degree

  bevel plane at the end of a V-groove, this angle refer to the inclination of
the end bevel

plane to the V-groove axes line (or bottom line). I think the method cuting
(100) silicon at

 9.7 degree angle can only get the bevel plane have a 45degree to Si surface,
the angle

 between the bevel plane and the V-groove bottom line is still -54.7 degree.
>
>
> Thanks ahead and best regards,
>
> Lib Zhou
> Yahoo! Sports - live college hoops coverage
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