durusmail: mems-talk: Plating metal into SU-8
Plating metal into SU-8
Plating metal into SU-8
Muralidhar K. Ghantasala
2002-03-20
Yes.  We did copper plating (used acid copper) into Su-8 mould.  Two
patterning methods were used.  Conventional lithography patterning as well as
laser micromachininng of  SU-8 and plating.  Both worked satisfactorily.

cheers

Muralidhar


>>> amandaplimmer@hotmail.com 03/21/02 05:24AM >>>
Hi

Does anyone out there have any experience of plating a metal ( I am trying
copper) into the structure of SU-8? What technique is used and what results
are obtained? Hope someone can help!

Amanda Plimmer
Denning Group
Inorganic Chemistry Lab
University of Oxford



------------------------------------------------
Amanda Plimmer
Lincoln College
Turl St
Oxford
OX1 3DR

07899 988238
internal ext. 20979


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