durusmail: mems-talk: MEMS die post-processing...
MEMS die post-processing...
2002-03-21
MEMS die post-processing...
Michael D Martin
2002-03-21
http://www.jpsalaser.com or http://www.resonetics.com

-Mike


>>> iog@inbox.ru 03/21/02 02:51AM >>>
Hi!

Can anybody give me information on service that provides laser cutting
of MEMS
dies? I need to cut smaller die out of 3*3 mm MEMS die. The MEMS stack
is 0.5
mm Si wafer and 0.5 mm anodically bonded glass.

Thank you,

Igor
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