Re: [mems-talk] single crystalline quartz micromachining, March 21, 2002

Gary, you may find tutorials, books, and hundreds of papers on single
crystal quartz processing in the digital archive at the IEEE Ultrasonics,
Ferroelectrics, and Frequency Control website

www.ieee-uffc.org/fc

Some of it is available to everyone, but, most is available to IEEE UFFC-S
members only.

...............John Vig.


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Message: 4
Date: Wed, 20 Mar 2002 14:26:05 -0500
To: mems-talk@memsnet.org
From: Gary Bernstein 
Subject: [mems-talk] single crystalline quartz micromachining
Reply-To: mems-talk@memsnet.org

Hello,

Can anyone give me some basic references on the micromachining of
single crystalline quartz?  The closer to a tutorial on the materials
and basic processing the better.

Thanks very much,

Gary H. Bernstein
University of Notre Dame
bernstein.1@nd.edu

______________________________________________________________
Gary H. Bernstein                       (219) 631-6269 (office)
Professor and Associate Chair           (219) 631-4393 (fax)
Department of Elec. Eng.                (219) 277-0752 (home)
275 Fitzpatrick Hall
University of Notre Dame
Notre Dame, IN  46556
gary.h.bernstein.1@nd.edu

See webpages at http://www.nd.edu/~micro/
                 http://www.nd.edu/~gbernste/
_______________________________________________________________