durusmail: mems-talk: Clean room equipment
Clean room equipment
2002-03-25
2002-03-22
Clean room equipment
Bill Moffat
2002-03-22
Robert,
       My company builds vacuum vapor primers for photo resist adhesion, Image
reversal equipment for lift off, silylation equipment for implanting silicon
in exposed areas, Plasma equipment for descum and strip of resist and Polymide
type organics.  Plus Polymide bake ovens.  We are not shy about revealing any
of our specifications or prices.  What do you need to know?  Bill Moffat

-----Original Message-----
From: Robert Johnstone [mailto:rjohnsto@cs.sfu.ca]
Sent: Thursday, March 21, 2002 2:11 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Clean room equipment


Hello Everyone,

I'm interested in starting a new clean-room from scratch.  Since we have a
very
good idea of the processes we want to run, I decided to collect information
about the necessary equipment online.  However, it turns out that most
suppliers
are very closed-mouthed about the equipment.  I understand there aren't going
to
quote prices, but I at least want comprehensive information about floor space
and required support services (air, vacuum, power, etc.).

Could someone please point me to a good source for this information?

Thank-you,


----------------------------------------
Robert Johnstone
Simon Fraser University
http://www.sfu.ca/~rjohnsto/
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