Hi folks,
I would like to get information if available about water resistant,
impervious coatings which can be applied over the silicon wafer.  The main
application is as follows:
I have a thermal sensor which is essentially 2500 angstrom thick aluminum
wire (acting as resistance sensor) vapor deposited over silicon wafer. The
sensor is used for freezing studies, and hence the whole assembly is cooled
and water condenses all over the sensor. Based on my earlier attempts, I
found that aluminum reacts with water and this corrodes the sensor.  So I
need to protect it using a coating.

Attempts with polimide failed, as with long time applications, the polimide
seemed to breathe (swell by absorbing water) and lost the adhesion with the
surface.  Can you suggest some coating which I can use for this pupose.
thanks in advance
Devan

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Mahadevan Ramaswamy, Ph. D.
Post-Doctoral Research Associate
Mechanical and Industrial Engineering
140 MEB                                         Phone:  217-244-8931
1206 W. Green St.                               Fax:    217-333-1942
University of Illinois at Urbana-Champaign      e-mail: devan@uxh.cso.uiuc.edu
Urbana, IL 61801
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