Hi all,

     I am a beginner in MEMS field and I am now fabricating a simple
cantilever beam. The sacrifical layer is Al (~2um). The beam thickness is
~0.5um and length is ~500um.   When I tried to release the structure using
AZ300 PR developer, I found that the released beam will bent or twist due
to the force caused by the fluid flow (PR developer).

   Even I hold the sample carefully, the beam still bent or twist when I
tried to pull the sample out of the solution. It can't stand straight. What
should I do? Is there any technique in handling this??  I guess this might
too simple to you. But it is important to me.  Can you suggest me with
detailed steps?  Thank you very much!!!!

Yours,
Hoyin



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