Monte,
      We at YES have produced an image reversal unit to allow a lift off
profile for metal lift off.  It is a standard process in the GaAs, Indium,
Lithium market.  As it seems to answer some of the problems for the MEMS guys
it is possible we will have to look into is our method of resist definition
compatible with your type of metal deposition.  If this is the case we may
investigate it together to see if we can answer some of our customers requests
better.  I am aware this may not fit with your ability to etch as etch is not
required with lift off.  But if the geometry or metal type is such that lift
off is the best answer we should be prepared.  The only criteria for metal
lift off is the metal deposition should not be too high a temperature at the
substrate to avoid frying the resist.  If there is any interest on a
co-operative effort please contact me.  Bill Moffat, C.E.O. Yield Engineering
Systems.  408 954 8353

-----Original Message-----
From: Heaton, Monte [mailto:monte@innovativemicrotech.com]
Sent: Friday, March 29, 2002 11:26 AM
To: 'wypeng@hotmail.com'; mems-talk@memsnet.org
Subject: [mems-talk] Cu Electric Deposition in Cleanroom?


Hello Wuyong:

Innovative Micro Technology has deposition and etch capabilities for a large
portion of the periodic table, including Cu.  Please contact me directly for
more information.

Regards-Monte

Monteith G. Heaton 
VP Marketing and Sales
Innovative Micro Technology
75 Robin Hill Road * Santa Barbara, CA  93117
Ph:  805-681-2852 * Fx:  805-967-2677
info@imtmems.com   * www.imtmems.com

_________________________________________
"Your strategic partner for MEMS design and 6" wafer
manufacturing services with 0.355m photolithography,
30,000 sq. ft. fab, and non-CMOS materials flexibility,
including metals/magnetics."

-----Original Message-----
From:   Wuyong Peng [mailto:] 
Sent:   Thursday, March 28, 2002 9:26 AM
To:     mems-talk@memsnet.org 
Subject:        [mems-talk] Cu Electric Deposition in Cleanroom?

Does anyone know if there is a cleanroom that allow Cu electric deposition
and etching? Thank you.
Wuyong Peng
MRC, NJIT
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