Hi Henry,

Thank you for your reply. Actually we have a class 100 cleanroom here in
NJIT. But they won't allow me doing Cu plating nor etching there. And they
also won't allow me doing process after that if my wafer has been processed
under a non-cleanroom environment. So I have to find another cleanroom that
allow Cu process then I can do other steps here later. I don't know if I can
find one, that's what I concerned.

Wuyong Peng
MRC, NJIT


----- Original Message -----
From: "Henry Yang" 
To: 
Sent: Monday, April 01, 2002 1:30 PM
Subject: Re: [mems-talk] Cu Electric Deposition in Cleanroom?


> Ok, so that's electrodeposition or electroplating or commonly refered to
as
> plating that we are talking about, right?
>
> Sure I don't see why it is diffucult to do that in a cleanroom
environment.
> The only thing you have to worry about is cross contamination. Make sure
> that you have a bench (or hood) that is desiginated for Cu plating only.
If
> you are not sharing the cleanroom with CMOS people, then I don't think
> anyone would object. Just purchase the plating bath from any of the
> reputable companies (Technics, for instance, although I don't work for
> them...). Obviously you need a power supply and a copper plate. A large
> beaker, with stir bar...
>
> Why were you concerned?
>
> Henry Yang
>
> "Wuyong Peng" @memsnet.org on 03/29/2002 09:33:28 AM
>
> Please respond to mems-talk@memsnet.org
>
> Sent by:    mems-talk-admin@memsnet.org
>
>
> To:    
> cc:
> Subject:    Re: [mems-talk] Cu Electric Deposition in Cleanroom?
>
>
>
> Yes. It is also called plating. Any idea I can do it in a cleanroom
> environment? Thanks in advance.
>
> Wuyong Peng
>
>
> ----- Original Message -----
> From: "Henry Yang" 
> To: 
> Sent: Thursday, March 28, 2002 9:30 PM
> Subject: Re: [mems-talk] Cu Electric Deposition in Cleanroom?
>
>
> > WHat do you mean electric depositon? Is that the same as
> electrodeposition,
> > as in electroplating?
> >
> > Henry Yang
> >
> > "Wuyong Peng" @memsnet.org on 03/28/2002 09:25:51 AM
> >
> > Please respond to mems-talk@memsnet.org
> >
> > Sent by:    mems-talk-admin@memsnet.org
> >
> >
> > To:    
> > cc:
> > Subject:    [mems-talk] Cu Electric Deposition in Cleanroom?
> >
> >
> >
> > Does anyone know if there is a cleanroom that allow Cu electric
> deposition
> > and
> > etching? Thank you.
> >
> > Wuyong Peng
> > MRC, NJIT
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