Hi Peng Yao,

Try Deltamask they make nice masks. All mine are made there too.

www.deltamask.nl

The minimum feature size is 1 micron.

Greetings,

Heiko van der Linden

-----Original Message-----
From: Peng Yao 
To: mems-talk@memsnet.org 
Date: Thursday, April 04, 2002 6:51 PM
Subject: [mems-talk] Need help of making mask


>Hi,
>I need to fabricate a 3" deep UV (365nm) mask. Does anyone know any
>company who can do this? The feature size we need is 2 micron. My pattern
>is very simple.
>Thanks.
>
>Peng Yao
>DOEs lab
>Electrical Engineering Dept.
>Univeristy of delaware
>Newark D.E 19716
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