Hello,

I have a question about SU-8 photoresist. Can you tell me if someone think
it's possible to define holes of 3-5 um diameter in SU-8 of 50-75 um thick?

If yes, is it possible to have your receipt?

Thank you for your help

Best regards


Mathieu Burri
SAMLAB Group
Institute of Microtechnology
University of Neuchbtel
Rue Jacquet Droz 1
CH-2000 Neuchbtel
Switzerland
+41 32 720 52 78
mathieu.burri@unine.ch