durusmail: mems-talk: silver etching!
silver etching!
silver etching!
Sreemanth M Venkata Uppuluri
2002-04-08
Can anyone please tell me what resist I should be using as a mask for
etching Silver? Also what is the solution suitable for etching Silver. I
have come across two types of solutions for etching Silver, one is an acid
mixture called Dilute Metal Etch - HNO3+H3PO4+CH3COOH and another called
Base Etch - NH4OH+H2O2+CH3OH. But these solutions also developed the
resist I used (PMMA). Please let me know.

Thanks
Sreemanth

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