You should be able to, It's only a 10:1 aspect ratio.



-Mike

_______________
Mike Bigelow
Technical Sales

DRC - Metrigraphics
60 Concord Street
Wilmington, MA 01887   USA

Tel:  + (978) 658-6100  ext. 3063
Fax: + (978) 657-7765


-----Original Message-----
From: BURRI Mathieu [mailto:mathieu.burri@unine.ch]
Sent: Friday, April 05, 2002 9:04 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] SU-8 small holes


Hello,

I have a question about SU-8 photoresist. Can you tell me if someone think
it's possible to define holes of 3-5 um diameter in SU-8 of 50-75 um thick?

If yes, is it possible to have your receipt?

Thank you for your help

Best regards


Mathieu Burri
SAMLAB Group
Institute of Microtechnology
University of Neuchbtel
Rue Jacquet Droz 1
CH-2000 Neuchbtel
Switzerland
+41 32 720 52 78
mathieu.burri@unine.ch
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